Electron drag force in EUV induced pulsed hydrogen plasmas

نویسندگان

چکیده

Abstract Extreme ultraviolet (EUV) induced pulsed plasma is unique due to its transient characteristics: the switches between non-thermal state (when EUV power ON at beginning of pulse) and thermal (end pulse ∼20 μ s). It shown that although electron drag force acting on nm size particles in hydrogen negligible compared ion pulse, however it can be dominant end play important role particle transport leading defectivity issues for semiconductor chip production technologies.

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ژورنال

عنوان ژورنال: Plasma Sources Science and Technology

سال: 2022

ISSN: ['1361-6595', '0963-0252']

DOI: https://doi.org/10.1088/1361-6595/ac60c1